| 摘要 |
PURPOSE:To facilitate the exchange of targets by providing an elastic partition plate between a backing plate and the space of a cathode. CONSTITUTION:The elastic partition plate 12 is provided between the backing plate 3 and the space of the cathode main body 1 to confine cooling water. The partition plate 13 is closely fixed to a rigid frame 13 by welding, etc., and integrated with the frame. The partition plate 12 and frame 13 are screwed in the cathode main body 1 through an 0 ring 4, and fixed. The backing plate 3, to which a target material 7 is bonded, is fixed from the upper part to the cathode body 1 by a screw. Consequently, when the targets 7 are exchanged, the discharge of cooling water, cleaning of the O ring, etc., and deaeration of cooling water are not needed, and the targets 7 are easily exchanged. |
