| 摘要 |
<p>This diode is used for a liquid crystal display of an active matrix type. The parasitic capacitance of the diode can be reduced, and a film with a large area and an even thickness can be formed, making it possible to fabricate a large liquid crystal display. An MIM diode has a structure made up of a metal layer for the lead-in electrode which is connected to a data bus, an ITO layer for the transparent electrode for forming a pixel, a metal layer for an electrode connecting the metal layer for the lead-in electrode, and the ITO layer, and an insulating layer between the metal layers for the lead-in electrode and connecting electrode. In this diode, a layer of porous aluminium oxide p-Al2O3 is formed between the insulating layer and the metal layer for connecting electrode. <IMAGE></p> |
