Process and apparatus for treating development waste liquor

摘要

A process for treating a development waste liquor comprising a photosensitive resin and a surface active agent, which comprises subjecting the waste liquor to a treatment for diminishing the efficacy of the surface active agent, thereby separating the resin component from the development waste liquor, thereafter irradiating the development waste liquor with an ultraviolet ray having a wavelength of 300 to 400 nanometers to cure the resin component in the development waste liquor, and then removing the resulting solids.