| 摘要 |
The present invention comprises a phase-shifting mask and a process for fabricating such a phase-shifting mask. The phase-shifting mask has trenches with vertical sidewall profiles which are retrogade. The retrogade profiles balance the transmission and phase of the light transmitted through the phase-shifted openings relative to the non-phase-shifted openings. The retrograde profile may be formed from an isotropic plasma etch. |
