发明名称 Ultra-thin high-precision glass optic and method of manufacturing same
摘要 The present invention provides an ultra-thin high-precision glass optic and method of manufacturing the same. The optic has an axial thickness that is less than 1,000 microns. A pattern and/or coating is disposed on a surface of the optic to provide attenuation of light in an optical system. In an embodiment, the optic is manufactured by disposing a pattern on a surface of a reticle. The pattern is covered with a first protective coating to protect the pattern. Individual optics are cut from the reticle so that each optic includes a portion of the pattern. The optic is thinned by removing material until it has an axial thickness of less than 1,000 microns. The optic is cleaned after thinning and covered with an anti-reflective coating.
申请公布号 US2006127779(A1) 申请公布日期 2006.06.15
申请号 US20040009705 申请日期 2004.12.13
申请人 ASML HOLDING N.V. 发明人 DELUCA NICHOLAS A.
分类号 G03C5/00;G02B6/00;G03B27/42;G03F1/00 主分类号 G03C5/00
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