HEAT TREATMENTING APPARATUS BY THE PLASMA RITRIDING

摘要

An equipment for performing surface heat treatment by plasma nitriding is provided to obtain the articles to be heat treated with superior surface roughness by performing plasma nitriding and adsorption even in a state that a voltage for plasma nitriding is not directly applied to base jigs or articles to be heat treated. In a plasma surface heat treatment equipment comprising: a furnace(31) having a heating means(33) and a cooling means installed in an equipment body(32); a vacuum line(35) for maintaining a vacuum atmosphere within the furnace; a gas supply line(36) for supplying nitrogen gas into the furnace; a power source supply part(37) for applying a positive power source and a negative power source into the furnace; and base jigs(40) installed in the equipment body to set articles(P) to be heat treated on the base jigs, an equipment(30) for performing surface heat treatment by plasma nitriding is characterized in that anode poles(50) to which the positive power source is applied from the power source supply part and cathode poles(60) to which the negative power source is applied from the power source supply part are vertically set up in a bar shape within the equipment body such that the anode poles and the cathode poles are spaced from one another in a predetermined gap, and a perforated plate(38) for forming a laminar flow of gas is formed on an inner lower part of the equipment body that comes in contact with the vacuum line.