SURFACE MODIFIED QUARTZ GLASS CRUCIBLE

摘要

A silica glass crucible of which a surface is modified is provided to form uniformly and completely cristobalite of surface of the crucible during pulling up monocrystal and to produce excellent dislocation free ratio. A silica glass crucible contains a transparent coating layer in which a mineralizing agent is dispersed within a silica matrix at inner side surface or outer side surface of surface of the crucible or the inner side surface and the outer side surface of surface of the crucible. The ransparent coating layer is made by coating silica sol liquid containing partial hydrolysis water of alkoxysilane oligomer and metal salt on surface of the crucible, plasticizing it and washing it with acid.