| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer discharge lamp in double tube structure capable of obtaining illuminance distribution having high uniformity by preventing an inner tube from being eccentric in an axial direction of an outer tube.SOLUTION: An excimer discharge lamp 10 comprises a discharge container 11 in double tube structure formed from a dielectric, including an outer tube 12 and an inner tube 13 that is disposed coaxially with the outer tube 12, and forming a discharge space S between the outer tube 12 and the inner tube 13. In the excimer lamp 10, one electrode 17 and another electrode 18 are provided oppositely to each other while interposing the discharge container 11 therebetween. In one end of the outer tube 12, a hollow tube 16 is formed which extends axially outwards and of which one end is sealed and the inside communicates to the inside of the outer tube 12. In one end of the inner tube 13, a projection 15 is formed which is inserted into the hollow tube 16.SELECTED DRAWING: Figure 1 |
