COATING APPARATUS AND COATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a coating apparatus capable of improving a yield of a coating.SOLUTION: A coating apparatus 10 comprises: a coating container 1 storing a coating L in which a coated part 91 of a workpiece 9 is immersed; a rotary table 2 in which the coating container 1 is installed and which is rotatable along with the coating container 1; a first rotation drive unit 3 which drives the rotary table 2 to rotate in such a manner that a coating liquid level within the coating container 1 forms a rotation paraboloidal surface; a workpiece holding section 4 which can hold a non-coated part 92 of the workpiece 9 and which can rotate along with the workpiece 9 about a rotational axis R2 parallel to a rotational axis R1 of the rotary table 2; and a second rotation drive unit 5 which drives the workpiece holding section 4 to rotate. When the workpiece 9 and the coating container 1 rotate after the coated part 91 of the workpiece 9 is immersed in the coating L and pulled up from the coating L, the coating flying off from the workpiece 9 arrives at the coating liquid level that forms the rotation paraboloidal surface and is recovered in the coating L within the coacting container 1.SELECTED DRAWING: Figure 1