摘要 |
<P>PROBLEM TO BE SOLVED: To provide inexpensive boride ceramics having high density, and applicable to various electrodes, to provide an electrode obtained by using the same, and to provide a method of producing the boride ceramics, which exhibits excellent productivity. <P>SOLUTION: The powder of rare earth based hexaboride powder and the powder of metal respectively having a mean particle diameter of 1 to 20 μm are uniformly mixed in such a manner that the amount of the metal powder is controlled to 2 to 10 vol.% to the amount of the rare earth based hexaboride powder, thereafter, pressurizing force of 1 to 100 MPa is applied thereto in a vacuum or in an Ar atmosphere, then, heating and sintering are performed to the temperature range of 1,723 to 2,273 K, and the sintered compact is made into the boride ceramics for an electrode. <P>COPYRIGHT: (C)2004,JPO&NCIPI |