THE CONVERGENCE PLASMA CLEANING APPRATUS

摘要

Disclosed is a high voltage convergence exhaust plasma cleaning apparatus. According to the present invention, the high voltage convergence exhaust plasma cleaning apparatus comprises: a reactor formed between a semiconductor reactor (chamber) and a vacuum pump, and forming a transformer coupled plasma (TCP); a ferrite core assembly mounted outside the reactor; a power line to apply power to the ferrite core assembly around which the power line is wound, and a power generator; and a high power ignition apparatus formed outside the reactor and mounted not to be overlapped with a position of the ferrite core assembly. Therefore, the high voltage convergence exhaust plasma cleaning apparatus can initially discharge power without an argon gas and a nitrogen gas and can specially maintain the plasma in the inflow of the large amount gas.