发明名称 |
OPTICAL ENDPOINT DETECTION SYSTEM |
摘要 |
Methods and apparatus for determining an endpoint of a process chamber cleaning process are provided. In some embodiments, a processing system having an endpoint detection system may include a process chamber having internal surfaces requiring periodic cleaning due to processes performed in the process chamber; and an endpoint detection system that includes a light detector positioned to detect light reflected off of a first internal surface of the process chamber; and a controller coupled to the light detector and configured to determine an endpoint of a cleaning process based upon the detected reflected light. |
申请公布号 |
US2016263634(A1) |
申请公布日期 |
2016.09.15 |
申请号 |
US201615162160 |
申请日期 |
2016.05.23 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
RAMACHANDRAN BALASUBRAMANIAN;ISHII MASATO;HUNTER AARON MUIR |
分类号 |
B08B9/46;C23C16/52;G01N21/94;C23C16/44;B08B3/08;B08B3/10 |
主分类号 |
B08B9/46 |
代理机构 |
|
代理人 |
|
主权项 |
1. A method of monitoring a process being performed in a process chamber, comprising:
performing a cleaning process in a process chamber to remove material deposited on one or more internal surfaces of the process chamber resultant from processes performed within the process chamber; shining a light on a first internal surface being cleaned; detecting the light reflected off of the first internal surface; and terminating the cleaning process based upon the detected light. |
地址 |
Santa Clara CA US |