| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate ratio control device capable of keeping actual total flow rate or actual mixture ratio of a fluid mixture constant even in a change interval where the actual flow rate of each component fluid that is generated when the target total flow rate or the target mixture ratio of the fluid mixture is changed.SOLUTION: With a flow rate ratio control device, each target flow rate set for each flow rate control device is provided with a continuous change interval in which a target flow rate value changes from a target flow rate value before change to a target flow rate value after change continuously, and the length of time of each of the continuous change intervals is set at a tracking possible time or larger that the flow rate control device whose response speed of the actual flow rate of a component fluid to the target flow rate is the slowest among each of the flow rate control devices can make the actual flow rate of the component fluid track against the target flow rate in the continuous change interval virtually.SELECTED DRAWING: Figure 1 |
