发明名称 GALLIUM ARSENIDE HBT AND METHOD FOR ITS FABRICATION
摘要 According to one exemplary embodiment, a gallium arsenide heterojunction bipolar transistor comprises a collector layer and a first spacer layer situated over the collector layer, where the first spacer layer is a high-doped P+ layer. For example, the first spacer layer may comprise GaAs doped with carbon. The gallium arsenide heterojunction bipolar transistor further comprises a base layer situated over the first spacer layer. The base layer may comprise, for example, a concentration of indium, where the concentration of indium is linearly graded in the base layer. The base layer may comprise InGaAsN, for example. The gallium arsenide heterojunction bipolar transistor further comprises an emitter layer situated over the base layer. The emitter layer may comprise, for example, InGaP.
申请公布号 EP1636855(B1) 申请公布日期 2016.12.14
申请号 EP20040709899 申请日期 2004.02.10
申请人 Skyworks Solutions, Inc. 发明人 ZAMPARDI, Peter, J.;CHOI, Kevin;RUSHING, Lance, G.
分类号 H01L31/0328;H01L;H01L21/331;H01L29/10;H01L29/20;H01L29/737 主分类号 H01L31/0328
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