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发明名称
PROBE DEVICE
摘要
申请公布号
JPH0661317(A)
申请公布日期
1994.03.04
申请号
JP19920226378
申请日期
1992.08.03
申请人
TOKYO ELECTRON LTD
发明人
ABE YUICHI;YAMAGUCHI MASAO
分类号
G01R1/073;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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