发明名称 Method for manufacturing device substrate with metal back-gate and structure formed thereby
摘要 A method (and resultant structure) of forming a semiconductor device, includes forming a metal-back-gate over a substrate and a metal back-gate, forming a passivation layer on the metal back-gate to prevent the metal back-gate from reacting with radical species, and providing an intermediate gluing layer between the substrate and the metal back-gate to enhance adhesion.
申请公布号 US6797604(B2) 申请公布日期 2004.09.28
申请号 US20010817120 申请日期 2001.03.27
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHAN KEVIN K.;HUANG LIJUAN;MCFEELY FENTON R.;SOLOMON PAUL M.;WONG HON-SUM PHILIP
分类号 H01L21/336;H01L21/762;H01L29/786;(IPC1-7):H01L21/476 主分类号 H01L21/336
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