| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact and highly-sensitive acceleration sensor to which a silicon LSI forming process is applicable with a symmetrical wiring pattern connected to a resonating body formed on a supporting beam and its vicinity. SOLUTION: This acceleration sensor comprises an inertia body 2 movable by acceleration, a supporting beam 3 which supports the inertia body 2 and deforms when the inertia body 2 moves and a resonating body 7 fixed next to the supporting beam 3 with an exciter 4 made of a piezoelectric element, a receiver 5 made of a piezoelectric element and a propagator 6. When acceleration is impressed, the impressed acceleration is measured by detecting the change of the resonating state of the resonating body 7 generated by the deformation of the resonating body 7 according to the defomation of the supporting beam 3 from the input signals into the exciter 4 and the output signals out of the receiver 5. In addition, an input-side common signal line 9 and an output-side common signal line 11 are provided with zero potential and simplified as a mutually-connected incorporated structure. |
