发明名称 STRUCTURE OF SEMICONDUCTOR CHIP HAVING A CONDUCTIVE LAYER
摘要 In order to prevent a relatively wide aluminum wiring layer (12) such as a power source wiring or a ground wiring formed on a semiconductor substrate (11) from being corroded by the sliding and, in the case of a multilayer interconnection, to prevent the lower-layer wiring from being broken by the sliding of the upper-layer aluminum wiring (12) and to prevent the generation of voids in the lower-layer aluminum wiring layer caused by moisture under the wide metal wiring layer, the relatively wide wiring layer (12) is devided in such a manner that each wiring layer after being divided will have a width of greater than 10 mu m but smaller than 40 mu m.
申请公布号 KR0174746(B1) 申请公布日期 1999.02.01
申请号 KR19910071923 申请日期 1991.12.20
申请人 OKI ELECTRIC INDUSTRY CO., LTD. 发明人 FUKUDA, YASUHIRO;SUGAHARA, TETESUHIKO;HIRASHITA, NORIO;MATSUO, MITSUHIRO;SAITO, MINORU;KOBAYAKAWA, MASAYUKI;YOKOYAMA, FUMITAKA
分类号 H01L23/528;(IPC1-7):H01L23/48 主分类号 H01L23/528
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