| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide manufacturing method which can easily embed an upper clad even when the ratio of the height of a core and the distance between the cores is large and can manufacture a high-precision optical waveguide. SOLUTION: This method for manufacturing the optical waveguide in which cores and a clad layer surrounding the cores are formed on a substrate includes a process for forming a lower clad layer on the substrate 11, a process for forming the core layer over the entire top surface of the lower clad layer, a process for forming the cores of the core layer, a process for forming a 1st upper clad layer 16 of specific thickness over the entire top surface of the lower clad layer and cores, a process for forming an inorganic SOG(spin on glass) film 17 in a groove 16a formed between the cores, and a process for forming a 2nd upper clad layer 18 over the entire top surface of the 1st upper clad layer and inorganic SOG film. Since the inorganic SOG film is formed, the ratio of the width and height of the groove is decreased to reduce the tilt of a side wall part. |
