| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide manufacturing method which can easily embed an upper clad even when the ratio of the height of a core and the distance between cores is large and manufacture a high-precision optical waveguide. SOLUTION: This manufacturing method for the optical waveguide in which cores and a clad layer surrounding the core are formed on a substrate includes a process for forming the lower clad layer 12 on the substrate 11, a process for forming a core groove 12a in the lower clad layer, a process for embedding a core material 14 in the core groove, a process for removing the core material projecting from the core groove, and a process for forming the upper clad layer 16 over the entire surface of the lower clad and core material. Even when the distance between the cores is smaller than the height of the cores, the core material is embedded in the core groove and neither the core material nor the clad layer needs to be formed between the cores where it is difficult to embed the core material, so the cores can easily be formed. |
