| 摘要 |
PROBLEM TO BE SOLVED: To provide vacuum equipment capable of easily performing the detaching work of a carrier robot regardless of the installation condition of a vacuum tub itself. SOLUTION: Vacuum equipment 1 is provided with a vacuum tub 2 having a top plate 6 and a fitting hole 21, carrier robot 10 having a conveying mechanism part 12 constituted to be capable of moving a mother board M inside the vacuum tub 2, a driving mechanism part 15 connected to the conveying mechanism part 12 for driving the conveying mechanism part 12 and a connecting flange part 16 provided in the connecting part of the conveying mechanism part 12 and the driving mechanism part 15, and a fitting adapter 30 having a first engaging part 31a capable of being engaged from the upside of the vacuum tub 2 to a lower step part 23 of the vacuum tub 2 and a second engageing part 31b capable of being engaged with the connecting flange part 16 of the carrier robot 10 while supporting that connecting flange part 16 from the downside of the vacuum tub 2.
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