| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that the accuracy of a screw-feeding mechanism is deteriorated due to the vibration and decentering of the driving shaft of a nut used for the screw-feeding mechanism. <P>SOLUTION: As for the screw-feeding mechanism of driving a stage while receiving the rotation of a driving shaft as a reference of the stage in a driving direction and a 1st screw (male screw) arranged in nearly parallel to the driving shaft by a 2nd screw (nut), at least one shaft is arranged so that it can rotate and slide around a 2nd screw, then, such the effects can be obtained that the 2nd screw (nut) smoothly follows the vibration and decentering of the driving shaft. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
