发明名称 SYSTEM AND METHOD FOR A VARIABLE HOME POSITION DISPENSE SYSTEM
摘要 <p>Embodiments of the present, invention provide a system and method for reducing the hold-up volume of a pump. More particularly, embodiments of the present invention provide a system and method for determining a home position to reduce hold-up volume at a dispense pump and/or a feed pump. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.</p>
申请公布号 KR20070089198(A) 申请公布日期 2007.08.30
申请号 KR20077014324 申请日期 2005.11.21
申请人 ENTEGRIS, INC. 发明人 LAVERDIERE MARC;CEDRONE JAMES;GONNELLA GEORGE;GASHGAEE IRAJ;MAGOON PAUL;KING TIMOTHY J.
分类号 H01L21/02;B67D7/30;H01L21/00 主分类号 H01L21/02
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