发明名称 Method for production of a semiconductor device with auto-aligned metallisations
摘要 This invention relates to a process for making a semiconductor device comprising the following steps: a doped region with a first type of conductivity is made on a first principal face of a semiconductor substrate and at least one window is made, a first metallisation area is deposited on the doped region, a dielectric layer is deposited on at least the window and the first metallisation area, at least a first opening is etched in the dielectric layer at the window to accommodate a doped region with a second type of conductivity while arranging an undoped portion of the semiconductor substrate laterally between the doped regions, the substrate is doped to create the doped region with the second type of conductivity, a second metallisation area is deposited. Application particularly for solar cells in thin layer.
申请公布号 US7364938(B2) 申请公布日期 2008.04.29
申请号 US20050555072 申请日期 2005.10.28
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 RIBEYRON PIERRE-JEAN;PIROT MARC
分类号 H01L21/00;H01L21/28;H01L29/41;H01L31/0224;H01L31/18 主分类号 H01L21/00
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