发明名称 Semiconductor device manufacturing apparatus, semiconductor device manufacturing method and semiconductor device
摘要 A semiconductor device manufacturing apparatus is provided with a drawing pattern printing part having a print head which ejects a conductive solvent, an insulative solvent and an interface treatment solution. The print head is formed in such a way that desired circuit drawing pattern can be printed on a wafer based on information on the drawing pattern from a wafer testing part, information on the wafer from a storage part and coordinate information from a chip coordinate recognition part. In a semiconductor device manufacturing method according to the present invention, a semiconductor device is manufactured by using the semiconductor device manufacturing apparatus in such a manner that desired circuits are formed through printing process. In the semiconductor device, pad electrodes and so on are formed in such a way that trimming process can be conducted by printing circuit drawing patterns.
申请公布号 US7481885(B2) 申请公布日期 2009.01.27
申请号 US20060412990 申请日期 2006.04.28
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 SHIMIZU KAZUHIRO;AKIYAMA HAJIME;YASUDA NAOKI
分类号 B05C5/02 主分类号 B05C5/02
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