| 发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME |
| 摘要 |
The present invention relates to a semiconductor device and a method for manufacturing the same. Disclosed is a semiconductor device including a substrate, a conductive line on the substrate, and a seed layer between the substrate and the conductive line, the seed layer including cobalt titanium nitride. |
| 申请公布号 |
US2016163588(A1) |
申请公布日期 |
2016.06.09 |
| 申请号 |
US201514598080 |
申请日期 |
2015.01.15 |
| 申请人 |
Industry-Academic Cooperation Foundation, Yonsei University ;Incheon University Industry Academic Cooperation Foundation |
发明人 |
KIM Hyungjun;YOON Jaehong;KIM Soohyeon;LEE Han-Bo-Ram |
| 分类号 |
H01L21/768;H01L23/532 |
主分类号 |
H01L21/768 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. (canceled) |
| 地址 |
Seoul KR |
