MEASURING APPARATUS AND METHOD FOR DETERMINING DIMENSIONAL CHARACTERISTICS OF A MEASUREMENT OBJECT

摘要

A measuring apparatus and method for determining dimensional characteristics of a measurement object use a sensor head in order to register desired measurement points on the measurement object. The sensor head comprises a polychromatic light source for generating light having various wavelengths of light, a spectrometer, and an optical system having at least one lens element. The optical system produces a first defined range of color dependent foci and a second defined range of color dependent foci in front of the at least one lens element. The spectrometer generates a first spectral information when the measurement object is in the first defined range, and it generates a second spectral information when the measurement object is in the second defined range. An evaluation unit exploits the first spectral range in a coarse measurement mode, and it exploits the second spectral range in a fine measurement mode.

主权项

1. A measuring apparatus for determining dimensional characteristics of a measurement object, comprising:
a workpiece table for positioning the measurement object, a sensor head arranged so as to be moveable relative to the workpiece table, a controller configured to move the sensor head relative to the workpiece table, an evaluation unit configured to determine positional information for a defined measurement point on the measurement object using information from the sensor head, and a selector for selecting between a coarse measurement mode and a fine measurement mode, wherein the sensor head comprises a polychromatic light source for generating polychromatic light having various wavelengths of light, a spectrometer, and an optical system having at least one lens element, wherein the optical system is configured to produce a first defined range of color dependent foci and a second defined range of color dependent foci in front of the at least one lens element, said second defined range being smaller than said first defined range, wherein the optical system is further configured to conduct light reflected from the measurement object onto the spectrometer, wherein the spectrometer generates a first spectral information when the measurement object is in the first defined range, and the spectrometer generates a second spectral information when the measurement object is in the second defined range, and wherein the evaluation unit exploits the first spectral information in the coarse measurement mode and exploits the second spectral information in the fine measurement mode.