Vacuum Pump Component, Siegbahn Type Exhaust Mechanism and Compound Vacuum Pump

摘要

A vacuum pump component includes a stationary disk that is formed with a spiral groove (helical groove) having a ridge portion and a valley part and has a projecting (protruding) portion on both or either one of an inner-diameter portion of the disk which faces a rotary cylinder (rotator cylinder-shaped portion) and an inner-diameter side of a stationary cylinder disposed on an outer peripheral side of the stationary disk. A second vacuum pump component includes rotary disk formed with a spiral groove having a ridge portion and a valley part and having a projecting (protruding) portion on both or either one of an outer-diameter portion of a rotary cylinder disposed on an inner peripheral side of the rotary disk and an outer-diameter portion of the rotary disk which faces a spacer.

主权项

1. A vacuum pump component, comprising:
a disk-shaped portion having a spiral groove disposed in at least a part thereof, wherein a projection is disposed on at least a part of at least any one of an inner peripheral side surface or an outer peripheral side surface of the disk-shaped portion in which the spiral groove is not disposed, an outer peripheral side surface of a cylinder-shaped portion which is disposed on an inner peripheral side of the disk-shaped portion and which is concentric to the disk-shaped portion, and an inner peripheral side surface of a cylinder-shaped portion which is disposed on an outer peripheral side of the disk-shaped portion and which is concentric to the disk-shaped portion.