发明名称 GAS PURGE UNIT
摘要 PROBLEM TO BE SOLVED: To provide a gas purge unit capable of preventing scattering of particles during introduction of purge gas.SOLUTION: A gas purge unit for introducing cleaned gas into a container, which has a main opening for taking contents in or out comprises: a cylindrical blow-out member having a long hollow extending in a long-side direction and an emission part allowing communication between the long hollow and outside and emitting the cleaned gas; and a supply part that connects to the long hollow via a communication hole formed in one end part of the blow-out member and supplies the cleaned gas to the long hollow.SELECTED DRAWING: Figure 5
申请公布号 JP2016192492(A) 申请公布日期 2016.11.10
申请号 JP20150071623 申请日期 2015.03.31
申请人 TDK CORP 发明人 KUDO TAKUYA;MIYAJIMA TOSHIHIKO
分类号 H01L21/677 主分类号 H01L21/677
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