| 发明名称 |
VACUUM PROCESSING APPARATUS |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum processing apparatus capable of improving the operation rate.SOLUTION: The vacuum processing apparatus includes: a system control unit 208; a processing module in which a sample is processed in a vacuum; an operation control unit 213 that controls the operation of the processing module; and an intermediate control unit 209 that transmits a signal from a system control unit 208 to an operation control unit 213. The intermediate control unit 209 has a conversion section that converts signals from the system control unit 208, and has a function to carry out at least a part of control function in place of the operation control unit 213.SELECTED DRAWING: Figure 3 |
| 申请公布号 |
JP2016213394(A) |
申请公布日期 |
2016.12.15 |
| 申请号 |
JP20150097910 |
申请日期 |
2015.05.13 |
| 申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
SHINOMIYA MITSUHIRO;MIYATA YOJI;YAMAGUCHI HIDETOSHI |
| 分类号 |
H01L21/677;C23C16/50;C23C16/52;H01L21/02;H01L21/3065;H01L21/31 |
主分类号 |
H01L21/677 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
