发明名称 |
ALKALINE DEVELOPER FOR RADIATION SENSITIVE COMPOSITION |
摘要 |
PROBLEM TO BE SOLVED: To provide an alkaline developer for a radiation sensitive compsn. which leaves no undissolved material even when the concn. of a pigment contained in the compsn. is high, does not cause problems such as the occurrence of scum, incomplete development and resticking and can form a pixel having sharp pattern edges. SOLUTION: This alkaline developer comprises an aq. soln. contg. at least one inorg. alkaline compd. and at least one org. alkaline compd. selected from the group consisting of alkanolamines and alkylamines or further contains at least one nonionic surfactant selected from the group consisting of etherified polyoxyethylenes and etherified polyoxyethylene-polyoxypropylene block copolymers. |
申请公布号 |
JPH11249322(A) |
申请公布日期 |
1999.09.17 |
申请号 |
JP19980069282 |
申请日期 |
1998.03.05 |
申请人 |
JSR CORP |
发明人 |
SAKURAI KOICHI;IIJIMA TAKAHIRO;ITOU YUKIKO;NEMOTO HIROAKI |
分类号 |
H01L21/027;G03F7/32;(IPC1-7):G03F7/32 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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