| 摘要 |
PROBLEM TO BE SOLVED: To easily manufacture a thermocouple wet bulb microsensor having a small size of about the extent which will not, give a change to the flow of air near a measuring point and change humidity distribution and high measuring accuracy. SOLUTION: The method for manufacturing the thermocouple wet bulb microsensor is realized by a method of directly adhering a water holding material to a thermocouple connecting part. As the holding material, a cellulose powder is used and as an adhesive, a heat conductive epoxy adhesive is used. A dry and wet microsensor can be made, by combining both the thermocouple, in which only the adhesive is adhered to the connecting part and solidified and a dry bulb microsensor.
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