ELECTRICAL TESTING OF WAVEGUIDES

摘要

An integrated waveguide array structure allows electrical testing of each unit for shorts between waveguide elements of the array, and shorts between waveguides and the substrate prior to assembly into a larger electronic-electronic unit. Multiple waveguide array structures are formed on a wafer, each waveguide array (62) being provided with a cross bar (74, 76) connected to an electrical contact (78) at each end, such that alternate waveguide elements of the array are electrically connected. When connected to a suitable testing device, the existence of shorts between adjacent elements can be immediately detected. Following testing, the cross bar and electrical contact are removed by scribing.