| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraviolet microscope capable of for reducing a sample damage caused on the occasion of ultraviolet rays observation and to provide an observation method using the same. SOLUTION: The ultraviolet microscope is provided with ultraviolet rays observation means (21-26, 41 and 43) by which a sample (11) is observed based on ultraviolet rays, gas supply means (51-57) by which an inert gas is supplied between the ultraviolet rays observation means and the sample, and a timing control means (13) which controls the inert gas supply timing by the gas supply means. In addition, the timing control means makes the gas supply means preliminarily supply the inert gas before observing the sample ultraviolet rays, and also fully supply the inert gas at least during the time of observing the sample with ultraviolet rays.
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