Vibration isolator, device manufacturing apparatus and method, semiconductor manufacturing plant and method of maintaining device manufacturing apparatus

摘要

A vibration isolator includes a vibration isolation platform, a vibration sensor installed on the vibration isolation platform, and an angle sensor for sensing an inclination angle of the vibration isolation platform. A detection signal from the vibration sensor is corrected based upon an output from the angle sensor, and the corrected detection signal is used in order to suppress vibration of the vibration isolation platform.