发明名称 |
Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for hydrostatic gas bearing device |
摘要 |
In a hydrostatic gas bearing for use in a vacuum, in order to provide a hydrostatic gas bearing in which an increase in the quantity of gas being discharged during the movement of a moving body is reduced, the surface of a guide shaft of a fixed body and/or the surface of the moving body is subjected to processing for reducing adhesion of gas molecules, for example, by coating the surface(s) with a material having a low adhesion probability of gas molecules, by which the quantity of gas being discharged is decreased. |
申请公布号 |
US7189002(B2) |
申请公布日期 |
2007.03.13 |
申请号 |
US20050298712 |
申请日期 |
2005.12.12 |
申请人 |
TOTO LTD. |
发明人 |
SHINOHARA SHINJI;TSUDA TAKUMA;HAYASHIDA TAKESHI |
分类号 |
F16C32/06;F16C29/02;G03F7/20 |
主分类号 |
F16C32/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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