发明名称 Semiconductor integrated circuit tester with interchangeable tester module
摘要 A test head for an integrated circuit tester includes a main chassis defining a chamber that is open at the top. Tester modules are installed in the chamber, each tester module being removable as a unit from the chamber and including a tester module chassis, multiple pin electronics cards, and a tester module interface structure exposed at the top of the chamber. A test head interface structure is engageable with the tester module interface structures of the tester modules for connecting the tester module interface structures to a device interface unit.
申请公布号 US7307440(B2) 申请公布日期 2007.12.11
申请号 US20050258529 申请日期 2005.10.25
申请人 CREDENCE SYSTEMS CORPORATION 发明人 MILLER WAYNE H.;RAMOS CARLOS R.;YOUNG PETER S.
分类号 G01R31/02 主分类号 G01R31/02
代理机构 代理人
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