METHOD FOR MANUFACTURING METAL OXIDE FILM, LAMINATED BODY AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a metal oxide film which can produce the metal oxide film with sufficiently high crystalline orientation easily, at low cost, and almost without damaging the base material and metal oxide film, as well as to provide a laminated body and an electronic device. SOLUTION: The manufacturing method includes a step of forming a metal film 14 having a crystalline plane (111) on a base material 10, a step of forming a metal oxide film 20 on a crystalline plane (111) of the metal film 14, and a step of irradiating ultraviolet rays to the metal oxide film 20 while keeping the temperature of the metal oxide film 20 formed on the crystalline plane (111) of the metal film 14 within the range from 25 to 600°C. COPYRIGHT: (C)2008,JPO&INPIT