| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing semiconductors capable of flexibly constituting a route, where wafers successively pass a plurality of treatment chambers. SOLUTION: The semiconductor manufacturing apparatus comprises two treatment units 30 that are constituted of two conveyance chambers 40, and a treatment chamber 31 arranged between the conveyance chambers 40, and has a treatment path, where wafers 26 are conveyed to the other treatment chamber 40, from one treatment chamber 40 via the treatment chamber 31. Respective treatment units 30 are mutually connected and the treatment paths are mutually connected, so that an arbitrary conveyance chamber 40 and other conveyance chambers 40 on the connected treatment paths are the starting and ending points, respectively, of treatment. COPYRIGHT: (C)2008,JPO&INPIT
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