Process for making a patterned metal oxide structure

摘要

There is provided a process for making a patterned metal oxide structure comprising the step of heating an imprint structure comprising a polymerized organometallic compound to remove organic material and thereby form the patterned metal oxide structure, wherein the imprint structure is formed by polymerizing a resist mixture comprising at least one olefinic polymerizable compound and a polymerizable organometallic compound having, e.g., at least one carboxylate of Formula 1:;
wherein
n is 1-12; andeach R is independently selected from the group consisting of hydrogen, alkyl, alkenyl, alkynyl, cycloakyl, cycloakenyl, aryl, and aralkyl.

主权项

1. A process for making a patterned metal oxide structure comprising the steps of:
(a) polymerizing a resist mixture, while in contact with a mold having imprint forming patterns thereon, to thereby form an imprint structure comprising a polymerized organometallic compound, said resist mixture comprising at least one olefinic polymerizable compound and a polymerizable organometallic compound having at least one carboxylate of Formula 1: wherein n is 1-12; and each R is independently selected from the group consisting of hydrogen, alkyl, alkenyl, alkynyl, cycloalkyl, cycloakenyl, aryl, and aralkyl; and (b) heating said imprint structure to remove organic material and thereby form said patterned metal oxide structure.