发明名称 |
SYSTEM FOR IMPROVING SOLAR CELL MANUFACTURING YIELD |
摘要 |
A system is described for fabricating photovoltaic structures. The system can include a photovoltaic cell enclosure that communicatively couples a first processing station and a second processing station while providing a microenvironment for a plurality of photovoltaic cells. The microenvironment can be separated from a surrounding environment. Furthermore, a microenvironment controller can control density of at least one chemical that could contaminate or react with an oxide layer on a respective photovoltaic cell, thereby protecting the photovoltaic cell between processes. |
申请公布号 |
US2016240722(A1) |
申请公布日期 |
2016.08.18 |
申请号 |
US201514830589 |
申请日期 |
2015.08.19 |
申请人 |
Silevo, Inc. ;Silevo China Co., Ltd. |
发明人 |
Heng Jiunn Benjamin;Xiao Chunguang;Yan Dongzhi;Zhou Jiansheng;Huang Zhiquan;Xu Zheng |
分类号 |
H01L31/18;H02S50/10;C23C16/44 |
主分类号 |
H01L31/18 |
代理机构 |
|
代理人 |
|
主权项 |
1. A system, the system comprising:
a substrate enclosure that communicatively couples a first processing station and a second processing station, the substrate enclosure comprising a microenvironment for storing a plurality of processed substrates, wherein the microenvironment is separated from a surrounding environment and has an absolute humidity that is lower than 5 g/kg; and a microenvironment controller configured to control density of at least one chemical that can contaminate or react with an oxide layer on a respective substrate, thereby protecting the substrate between processes. |
地址 |
Fremont CA US |