发明名称 SYSTEM FOR IMPROVING SOLAR CELL MANUFACTURING YIELD
摘要 A system is described for fabricating photovoltaic structures. The system can include a photovoltaic cell enclosure that communicatively couples a first processing station and a second processing station while providing a microenvironment for a plurality of photovoltaic cells. The microenvironment can be separated from a surrounding environment. Furthermore, a microenvironment controller can control density of at least one chemical that could contaminate or react with an oxide layer on a respective photovoltaic cell, thereby protecting the photovoltaic cell between processes.
申请公布号 US2016240722(A1) 申请公布日期 2016.08.18
申请号 US201514830589 申请日期 2015.08.19
申请人 Silevo, Inc. ;Silevo China Co., Ltd. 发明人 Heng Jiunn Benjamin;Xiao Chunguang;Yan Dongzhi;Zhou Jiansheng;Huang Zhiquan;Xu Zheng
分类号 H01L31/18;H02S50/10;C23C16/44 主分类号 H01L31/18
代理机构 代理人
主权项 1. A system, the system comprising: a substrate enclosure that communicatively couples a first processing station and a second processing station, the substrate enclosure comprising a microenvironment for storing a plurality of processed substrates, wherein the microenvironment is separated from a surrounding environment and has an absolute humidity that is lower than 5 g/kg; and a microenvironment controller configured to control density of at least one chemical that can contaminate or react with an oxide layer on a respective substrate, thereby protecting the substrate between processes.
地址 Fremont CA US