DEVICE AND METHOD FOR PROCESSING OF MATERIALS USING LASER RADIATION

摘要

The invention discloses a device for laser material machining, with at least two laser beam sources (2a-2c) which emit laser beams (5a-5c) of different wavelengths, with associated beam imaging means (3a-3c), to configure appropriately the beam paths of each associated laser beam (5a-5c), a beam superposition device (6), to overlay the laser beams (5a-5c) on each other, and imaging optics (8), to image the overlaid laser beams (5a-5c) onto a workpiece (12) so that respective focal points are associated with the laser beams (5a-5c) in the focus of the imaging optics (8) on the workpiece (12), wherein the beam imaging means image the laser beams (5a-5c) onto the respective focal points in a predefined arrangement which can be varied by means of the beam imaging means (3a-3c). According to the invention, electronic control devices (4a-4c) are provided which are able to vary each of the outputs of the laser beams (5a-5c) with a high frequency to vary the intensities of the respective focal points at the focus of the imaging optics (8) in a predefined manner. In this way, a high frequency control of the parameters of laser material machining which can be combined with conventional modulation techniques is implemented.