| 发明名称 |
MULTI-LAYERED MEMS SPEAKER |
| 摘要 |
A micro-electromechanical system (MEMS) device that may include a substrate, support structures and functional elements; wherein the functional elements are included in a plurality of functional layers, the plurality of functional layers are spaced apart from each other; wherein the support structures are conductive and are configured to provide structural support to the plurality of functional layers; wherein each functional element is electrically coupled to at least one of the support structures; and wherein the support structures are spaced apart from each other. |
| 申请公布号 |
US2016277838(A1) |
申请公布日期 |
2016.09.22 |
| 申请号 |
US201615072379 |
申请日期 |
2016.03.17 |
| 申请人 |
DSP Group LTD. |
发明人 |
Kupershmidt Haim;Margalit Moti;Baram Adi |
| 分类号 |
H04R7/16 |
主分类号 |
H04R7/16 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A micro-electromechanical system (MEMS) device that comprises a substrate, support structures and functional elements;
wherein the functional elements are included in a plurality of functional layers, the plurality of functional layers are spaced apart from each other; wherein the support structures are conductive and are configured to provide structural support to the plurality of functional layers; wherein each functional element is electrically coupled to at least one of the support structures; and wherein the support structures are spaced apart from each other. |
| 地址 |
Herzeliya IL |
