| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment apparatus capable of preventing the degradation of an O ring due to irradiation with flash light, and a method for manufacturing the heat treatment apparatus.SOLUTION: A sealing structure is achieved by sandwiching an O ring 21 between an upper chamber window 63 and a chamber side portion 61 and pressing a clamping ring 67 against a top of a peripheral portion of the upper chamber window 63. Grooving is performed on a lower surface and an upper surface of the peripheral portion of the upper chamber window 63, to thereby form a plurality of grooves 22 thereon. Flash light traveling into the peripheral portion of the upper chamber window 63 during irradiation with flash light is reflected by the plurality of grooves 22 and is prevented from traveling toward the O ring 21. This significantly reduces an amount of flash light reaching the O ring 21, and thus degradation of the O ring 21 due to irradiation with flash light can be prevented.SELECTED DRAWING: Figure 8 |
