RESIST LIQUID STORAGE CONTAINER, RESIST LIQUID SUPPLY DEVICE, RESIST LIQUID COATING DEVICE, RESIST LIQUID STORAGE DEVICE AND METHOD FOR PRODUCING MASK BLANK

摘要

PROBLEM TO BE SOLVED: To provide a resist liquid storage container, a resist liquid storage device, a resist liquid supply device and a resist liquid coating device, in which a resist liquid in a flexible storage container for a resist liquid can be efficiently circulated.SOLUTION: A resist liquid storage container 1 includes: a flexible bag part 2 having a housing section 2a for reserving a resist liquid; an injecting tube 9 for injecting a resist liquid, the injection tube being communicated with the housing section 2a; and a discharge tube 8 for discharging a resist liquid to the outside of the resist liquid storage container, the discharge tube being communicated with the housing section.SELECTED DRAWING: Figure 1