| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element that is able to prevent alkali metal from reaching a substrate and that is able to avoid a decrease in various characteristics, such as durability.SOLUTION: A piezoelectric element 300 comprises: a zirconium oxide layer 52 formed on a substrate 10; a first electrode 60 formed on the zirconium oxide layer 52; a piezoelectric layer 70 composed of a complex oxide of ABOtype perovskite structure formed on the first electrode 60 and containing kalium (K), natrium (Na) and niobium (Nb); and a second electrode 80 formed on the piezoelectric layer 70. When changes in respective amounts of kalium and natrium are checked in an area Rf extending over the first electrode 60 side interface f of the zirconium oxide layer 52, they are smaller on the substrate 10 side of the interface f than the first electrode 60 side of the interface f.SELECTED DRAWING: Figure 4 |
