| 主权项 |
1. A processing facility comprising:
a container for holding an object to be held therein; a container support for supporting the container from below with the container positioned in a set position, the container support having a top surface; a container side connecting portion which is provided in a bottom portion of the container and which has a communicating hole capable of allowing communication between an interior space of the container and outside the container; a support side connecting portion which is provided to the container support and which has a supply hole for supplying gas to the interior space of the container or a discharge hole for discharging gas from the interior space of the container, the support side connecting portion being annular in shape with the supply hole or the discharge hole formed in a center portion thereof; and a positioning pin provided upright on the top surface of the container support for positioning the container in a proper position when placing the container on the container support, wherein a container side contact surface which is an undersurface of the container side connecting portion and a support side contact surface which is a top surface of the support side connecting portion are configured to be in contact with each other and to allow communication between the supply hole or the discharge hole and the communicating hole, when the container is supported by the container support, wherein the container side contact surface is formed to be flat at least in a periphery of the communicating hole, wherein the support side contact surface is formed to have a shape that is gradually lower as a distance increases from the supply hole or the discharge hole, wherein the support side connecting portion is formed as a solid body which is annular in shape with the supply hole or the discharge hole formed in the center portion thereof, wherein an entirety of the support side connecting portion is located directly above the top surface of the container support such that the container support supports the support side connecting portion against a force applied to the support side connecting portion by the container side connecting portion when the container is supported by the container support, and wherein an elastic sheet member is held between the support side connecting portion and the top surface of the container support, and wherein the support side connecting portion is made of material having an elastic modulus that is greater than an elastic modulus of the elastic sheet member. |
