发明名称 |
Disk scanning apparatus for batch ion implanters |
摘要 |
A mechanical scanning system for a batch ion implanter includes a disk for mounting wafers at sites near its periphery and a disk drive assembly for rotating the disk. The disk and the disk drive assembly are supported in an end station vacuum chamber by a scan arm which extends through a sealed opening in an access door. A scan drive assembly attached to the access door scans the scan arm and the disk in an arc-shaped path. Simultaneous rotation and scanning of the disk cause the ion beam to be distributed over the surfaces of the wafers mounted on the disk. A pivot drive assembly rotates the scan arm and the disk about a pivot axis between an implant position and a load/unload position. A bellows seals the scan arm to the vacuum chamber while tranmitting arc-shaped movement into the vacuum chamber. A bellows guide apparatus guides an intermediate portion of the bellows so as to limit lateral distortion caused by pressure differences applied to the bellows in combination with asymmetrical deflection thereof.
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申请公布号 |
US4965862(A) |
申请公布日期 |
1990.10.23 |
申请号 |
US19890407855 |
申请日期 |
1989.09.15 |
申请人 |
VARIAN ASSOCIATES, INC. |
发明人 |
FREYTSIS, AVRUM;SEDGEWICK, JUDY E. |
分类号 |
C23C14/48;B65G49/07;G21K5/10;H01J37/317;H01L21/265;H01L21/673;H01L21/68 |
主分类号 |
C23C14/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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