发明名称 DEVICE FOR GRIPPING AND HOLDING A SUBSTRATE
摘要 A device for gripping and holding a substrate comprises at least two clamping parts (15, 17). The first clamping part (15) is arranged a distance apart from the second clamping part (17). First and second clamping parts (15, 17) are movable relative to each other along a longitudinal axis (20) so that they can grip and clamp a substrate (13) at opposite edges. In a preferred embodiment the clamping parts (15, 17) are formed by rollers. At least the rollers (17) are rotatable about an axis perpendicular to the plane of the substrate (13) to be gripped in order to allow a rotation of the substrate (13) when it is gripped. The device has the advantage that the substrate, when it is gripped, takes always a centered and well defined position.
申请公布号 WO9745861(A1) 申请公布日期 1997.12.04
申请号 WO1997EP02778 申请日期 1997.05.28
申请人 HOLTRONIC TECHNOLOGIES LTD.;MAYER, HERBERT 发明人 MAYER, HERBERT
分类号 H01L21/687;(IPC1-7):H01L21/00 主分类号 H01L21/687
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