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发明名称
COATING APPARATUS OF PHOTO RESIST
摘要
申请公布号
KR0165480(B1)
申请公布日期
1999.02.01
申请号
KR19950042625
申请日期
1995.11.21
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
SI, SUK-KI;HAN, SEUNG-KYU;KIM, SAM-HWAN
分类号
G03F7/16;B05C5/00;B05C11/08;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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